프로윈 :: Mask Aligner

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Mask Aligner

the Best Optics Expert. Mask Aligner

> M-100
> M-150
> S-150
> P-150
> S-200
> F-200
> S-300
> M-500
> T-700
> L-100

Mask Aligner

프로윈의 Mask Aligner는 감광액(PR: Photo Resist)이 도포된 반도체용 웨이퍼나 유리기판위에 회로가 그려진 포토 마스크를 올려놓고 UV를 조사함으로써 미세 패턴을 얻을 수 있는 Optical Lithography 장비입니다. 정밀 얼라인먼트가 가능하여 터치스크린 패널, 평판 디스플레이, MEMS/Bio-MEMS, LED 등의 정밀정렬 및 Patterning에 응용 가능합니다.

M-100

제품이미지

제품 사양
Equipment	M-100
Type	PLC Control Manual system
Mask Size	up to 5”×5”
Substrate Size	Piece to 4”
Resolution	1㎛
Alignment Accuracy	1㎛
Lamp & Power supply	350W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3%
Contact Mode	Vacuum / Hard / Soft / Proximity
Microscope	Dual CCD Zoom Microscope
Option	Anti-vibration table IR BSA CCD BSA

M-150

제품이미지

제품 사양
Equipment	M-150
Type	PLC Control Manual system
Mask Size	up to 7”×7”
Substrate Size	Piece to 6”
Resolution	1㎛
Alignment Accuracy	1㎛
Lamp & Power supply	350W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3%
Contact Mode	Vacuum / Hard / Soft / Proximity
Microscope	Dual CCD Zoom Microscope
Option	Anti-vibration table IR BSA CCD BSA

S-150

제품이미지

제품 사양
Equipment	S-150
Mask Size	7”
Substrate Size	6”
Substrate chuck moving mode	Manual/ (Z,θ motorized)
Lamp power	1kw
Beam uniformity	3~5%
UV Intensity	365nm~450nm / 365nm : 20mw/㎠
Resolution	1um
Alignment accuracy	1um
Operation	Manual / semi-auto
Contact mode	soft, hard, vacuum, proximity
Control type	Manual, touch, joystick

P-150

제품이미지

제품 사양
Equipment	P-150
Type	Touch PC Control Manual system
Mask Size	up to 7”×7”
Substrate Size	Piece to 6”
Resolution	1㎛
Alignment Accuracy	1㎛
Lamp & Power supply	350W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3%
Contact Mode	Vacuum / Hard / Soft / Proximity
Microscope	Dual CCD Zoom Microscope
Option	Anti-vibration table IR BSA CCD BSA

S-200

제품이미지

제품 사양
Equipment	S-200
Type	Touch PC Control & Joystick Semi-auto system
Mask Size	up to 7”×7”~14”×14”
Substrate Size	Piece to 6”~12’
Stage	X, Y, X, θ Motorize control
Lamp & Power supply	350W ~ 2000W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3~5%
Resolution	1um
Alignment accuracy	1um
Contact Mode	Vacuum / Hard / Soft / Proximity
Control Mode	Manual / Semiauto / Joystick
Microscope	Dual CCD Zoom Motorize Microscope
Option	Anti-vibration table CCD BSA

F-200

제품이미지

제품 사양
Equipment	F-200
Type	Touch PC Control & Joystick Semi-auto system
Mask Size	up to 9”×9”
Substrate Size	8”
Stage	X, Y, X, θ Motorize control
Lamp & Power supply	1000W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3~5%
Resolution	1um
Alignment accuracy	1um
Contact Mode	Vacuum / Hard / Soft / Proximity
Control Mode	Full Auto
Microscope	Dual CCD Zoom Microscope
Option	Anti-vibration table CCD BSA

S-300

제품이미지

제품 사양
Equipment	S-300
Type	Touch PC Control & Joystick Semi-auto system
Mask Size	up to 7”×7”~14”×14”
Substrate Size	Piece to 6’~12”
Stage	X, Y, X, θ Motorize control
Lamp & Power supply	350W ~ 2000W
Wave Length	350~450nm
UV Intensity	15~25㎽/㎠
UV Beam Uniformity	3~5%
Resolution	1um
Alignment accuracy	1um
Contact Mode	Vacuum / Hard / Soft / Proximity
Control Mode	Manual / Semiauto / Joystick
Microscope	Dual CCD Zoom Motorize Microscope
Option	Anti-vibration table CCD BSA

M-500

제품이미지

제품 사양
Equipment	M-500
Type	PLC Touch Control system
Mask Size	500mm×500mm 이상
Substrate Size	370mm×470mm
Resolution	10㎛
Lamp & Power supply	5000W
Wave Length	350~450nm
UV Intensity	15~20㎽/㎠
UV Beam Uniformity	5~7%
Contact Mode	Vacuum / Hard / Soft / Proximity
Microscope	Dual CCD Zoom Microscope
Option	X,Y,X,θ Motorizing Scope Motorizing

T-700

제품이미지

제품 사양
Equipment	T-700
Beam Size	Up to 800 mm×800 mm
Resolution	Less Than 10㎛ [@PR] in Proximity
Alignment Accuracy	Less Than ± 5.0 ㎛
Alignment	Semi Auto / Auto
Substrate Size	700 mm×700 mm
Lamp Power	8 kW NUV
Wave Length	365 nm
UV Intensity	20 mW/cm2
UV Beam Uniformity	Less Than ± 5 % [700 mm×700 mm]
Contact Mode	Hard/Soft and Proximity
Chuck Incremental Z-Motion	Accuracy 1 ㎛
Microscope	Dual Motorizing Zoom Microscope
Operation System	Auto, Semi Auto

L-100

제품이미지

제품 사양
Equipment	L-100
Type	PLC Control Manual system
Mask Size	Max 7”×7”
Substrate Size	Piece to 6”
Resolution	1㎛
Alignment Accuracy	1㎛
UV Lamp & Power	UV LED & POWER SUPPLY
Wave Length	365nm
UV Intensity	~40㎽/㎠
UV Beam Uniformity	3~5%
Contact Mode	Vacuum / Hard / Soft / Proximity
Microscope	Dual CCD Zoom Microscope
Option	nti-vibration table IR BSA,CCD BSA

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